Leading Edge Semiconductor Company Places Multi-System Laser Annealing Order Including First Nanosecond Annealing System
07 Mai 2024 - 3:00PM
Veeco Instruments Inc. (NASDAQ: VECO) announced today that a
leading edge semiconductor company has placed an order for multiple
laser annealing systems to accelerate the design and manufacturing
of 2-nanometer gate-all-around logic semiconductor chips. The order
includes LSA201™ Laser Spike Annealing Systems in addition to an
NSA500™ Nanosecond Annealing System. Gate-all-around is a vertical
stacking of planar channels resulting in improved device drive
current capability with minimal leakage, less power consumption,
and overall enhanced performance.
“We are excited to have our annealing platforms
chosen to accelerate next-generation gate-all-around logic device
production to meet demand for growing markets such as artificial
intelligence,” commented Adrian Devasahayam, Ph.D., Veeco’s Senior
Vice President, Product Line Management. “Veeco's LSA system is
widely acknowledged as the optimum annealing solution for low
thermal-budget applications in logic. The new NSA500 system offers
customers superior performance, scalability, and productivity to
enable product roadmaps. These benefits are essential to ensuring
high device performance as node sizes decrease and production
complexity increases.”
Laser spike annealing is a millisecond annealing
technology used in front-end semiconductor manufacturing to lower
the resistance of key transistor structures by activating dopants.
Veeco’s LSA system is capable of high temperature annealing while
staying within reduced thermal budgets of advanced devices at
leading-edge nodes. The NSA500 system extends annealing
capabilities to low thermal budget applications, like Backside
Power Delivery and Contact Annealing for advanced nodes and
material modification applications such as void-removal,
recrystallization, and grain growth. These annealing steps are
instrumental in determining the electrical properties and
performance of the resulting devices.
About Veeco Veeco (NASDAQ:
VECO) is an innovative manufacturer of semiconductor process
equipment. Our laser annealing, ion beam, chemical vapor deposition
(CVD), metal organic chemical vapor deposition (MOCVD), single
wafer etch & clean and lithography technologies play an
integral role in the fabrication and packaging of advanced
semiconductor devices. With equipment designed to optimize
performance, yield and cost of ownership, Veeco holds leading
technology positions in the markets we serve. To learn more about
Veeco’s systems and service offerings, visit www.veeco.com.
To the extent that this news release discusses
expectations or otherwise makes statements about the future, such
statements are forward-looking and are subject to a number of risks
and uncertainties that could cause actual results to differ
materially from the statements made. These factors include the
risks discussed in the Business Description and Management's
Discussion and Analysis sections of Veeco's Annual Report on Form
10-K for the year ended December 31, 2023 and in our subsequent
quarterly reports on Form 10-Q, current reports on Form 8-K and
press releases. Veeco does not undertake any obligation to update
any forward-looking statements to reflect future events or
circumstances after the date of such statements.
Veeco Contacts: Investors:
Anthony Pappone | (516) 500-8798 | apappone@veeco.com Media: Kevin
Long | (516) 714-3978 | klong@veeco.com
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