New ADE FabVision Data Management System Purchased by Leading Japanese Silicon Wafer Supplier; Fab-Wide Data Analysis, Storage a
12 Juillet 2005 - 6:24PM
Business Wire
ADE Corporation (Nasdaq: ADEX) today announced the sale of its new
FabVision(TM) system, to a leading Japanese semiconductor wafer
supplier. The system is installed in one of the company's
leading-edge production facilities. FabVision is a real-time,
comprehensive, fab-wide data management system that continuously
monitors, reports and manages product quality information.
Integration of FabVision has shortened the customer's cycle times
and increased process yields. Alerts on process excursions, daily
reports and selected data are generated and sent automatically
worldwide to better manage operations at the fab, process or
customer level. "The purchase and acceptance of FabVision has
allowed our customer to combine data from multiple tool types for
an enhanced view of each process step," stated ADE President and
CEO Dr. Chris L. Koliopoulos. "With the ease of data access and the
automatic alerts on all out-of-spec conditions, they have been able
to quickly analyze and resolve process problems, resulting in
improved cost of ownership and higher yields. FabVision is a unique
system that leverages the ADE tool base for further benefit and
advantage to our customers who adopt this process yield management
system." The FabVision system includes a fully integrated master
server, tool interconnections, workstations and software that
enables the user to easily collect, analyze, store and retrieve
critical metrology and inspection data from a wide range of
measurement and inspection tools distributed throughout the
production process without interruption or throughput reduction.
With FabVision, wafer manufacturers and wafer reclaim operations
have the ability to retain the metrology and inspection data for
millions of wafers and to retrieve critical information about those
wafers in seconds. The integrated database enables a quick analysis
and response to customers' inquiries about product history and
quality. With real-time production information, the FabVision
system provides management, engineering and operations with the
capability to proactively detect process excursions that can lead
to yield loss. The FabVision server collects and combines data from
ADE's just introduced WaferXam(TM) defect detection and
classification tool and industry standard WaferSight(TM) optical
flatness system, AFS(TM) Advanced Flatness System, AWIS(TM)
Advanced Wafer Inspection System, FIT(TM) Film Inspection Tool,
NanoMapper(R) surface topography system, AcuMap(TM) film thickness
mapper, WaferCheck(R), UltraGage(R) and UltraScan(R) dimensional
sorting systems and CR8X particle inspection products. Tying
together the data from these tools improves process yields and
increases tool utilization, which lowers the total cost of
manufacturing. As wafer makers and reclaim houses increase capacity
and add tools, FabVision reduces the complexity of reviewing
thousands of wafers a day for product yield management. ADE is
demonstrating the FabVision data management system, as well as its
full line of silicon wafer production and semiconductor process
control systems, at Semicon West, July 12 -14, Moscone Center,
South Hall, Booth 1302, in San Francisco. For more information,
contact ADE at FabVisionInfo@ade.com About ADE Corporation ADE
Corporation is a leading supplier of metrology and inspection
systems required for production in the silicon wafer, semiconductor
device, magnetic data storage and optics manufacturing industries.
The Company's systems analyze and report product quality at
critical manufacturing process steps for yield enhancement,
providing quality certification data that is relied upon by
semiconductor wafer, device and computer disk manufacturers. The
Company's systems also are used for production measurements in the
semiconductor chip fabrication process. To learn more about ADE,
visit the Company's Web site at http://www.ade.com.
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