FUJIFILM Invests in Next-Gen 45/32 nm Lithographic Tool
17 Janvier 2008 - 7:00PM
Business Wire
FUJIFILM Corporation today announced the purchase of an advanced
argon fluoride (ArF) immersion scanner for FUJIFILM Electronic
Materials, a subsidiary of FUJIFILM and a leading global supplier
of photoresists, developers, cleaners & removers, polyimides
and thin film chemicals and equipment for the semiconductor
industry. By making this investment, Fujifilm proves again it�s
commitment to the semiconductor industry and allows the company to
bring its recently announced FAiRS-9000� family of ArF immersion
photoresists to high-volume manufacturing faster. FAiR� technology
eliminates the need for a protective topcoat film, enabling large
semiconductor manufacturers to further reduce their cost of
ownership at the 45 and 32 nm production nodes by simplifying the
lithographic process. Eliminating the traditional protective
topcoat film from the lithographic process improves productivity
and reduces manufacturing costs. Additionally, the FAiR� technology
will help advance semiconductor producers� 45nm node design and
manufacturing capability, which is estimated to begin in 2010.
Smaller circuit design will significantly increase the number of
semiconductors produced on each silicon wafer. Today, mass
production processes are generating chips at the 65nm node.
�Acquisition of this toolset is essential to achieve high
market-share in this very competitive technology area,� said Keiji
Mihayashi, President and CEO, FUJIFILM Electronic Materials U.S.A.,
Inc. �In combination with the FAiR� technology, we will accelerate
our presence in the market by leveraging these advances in
topcoat-free technology and by extending them to new high-quality
photoresists being developed for 32nm manufacturing.� Fujifilm�s
acquisition of the ArF immersion exposure tool and state-of-the-art
lithography cell will enable Fujifilm to continuously evaluate ArF
immersion photoresists and respond quickly to customer engineering
and design requests using the same toolsets that are being acquired
by customer manufacturing plants. The ArF immersion exposure tool
is compatible with 45 and 32 nm node immersion lithography
processes that use an argon fluoride laser as a light source to
form the circuit patterns in very precise semiconductor devices of
45nm and smaller dimensions. This process improves optical
resolution by using water to fill the gap between exposure
projection lens and the photoresist film that is coated on a
silicon substrate. Learn more about FUJIFILM Electronic Materials
advanced lithographic technology at www.fujifilm-ffem.com. About
FUJIFILM FUJIFILM Electronic Materials U.S.A. Inc. is a wholly
owned subsidiary of FUJIFILM Corporation, with regional
headquarters in Japan, United States and Belgium and several
manufacturing and R&D facilities located worldwide. The company
supplies advanced technology chemistry and delivery equipment to
the semiconductor and flat panel display fabrication market.
FUJIFILM Holdings Corporation (NASDAQ:FUJI) brings continuous
innovation and leading-edge products to a broad spectrum of imaging
industries including medical, life sciences, consumer electronic,
chemical, graphic arts, information systems, photography and office
products based on its vast portfolio of digital, optical, fine
chemical and thin film coating technologies. It was ranked number
15 for U.S. patents granted in 2006, employs more than 75,000
people worldwide and in the year ended March 31, 2007, had global
revenues of $23.6 billion. For more information, please visit
www.fujifilmholdings.com. All product and company names herein may
be trademarks of their registered owners.
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