BEVERLY,
Mass., March 20, 2024 /PRNewswire/
-- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading
supplier of enabling ion implantation solutions for the
semiconductor industry, announced today multiple shipments of the
Company's Purion M™ SiC medium current implanter to several leading
power device chipmakers located in China. The systems, which shipped in the first
quarter, will be used for 150mm production of silicon carbide power
devices supporting automotive, industrial, energy, and other power
intensive applications.
President and CEO, Russell Low
commented, "We look forward to supporting our customers as they
expand their manufacturing capabilities in this growing silicon
carbide power device segment. To meet market demand, chipmakers
need to maximize their yield and add capacity, while meeting a
range of technical challenges unique to power devices. The Purion M
SiC Power Series platform's common and flexible architecture,
coupled with its uniquely differentiated high temperature
capability, makes it ideally suited for this expanding
application."
Executive Vice President of Marketing and Applications,
Greg Redinbo added "The Purion M SiC
tool provides customers an implanter with a broad dose and energy
range perfect for the early phases of a fab production ramp. The
Purion M SiC sets the stage for the future introduction of the
Purion H200™ SiC and Purion XE™ SiC. Use of the full
Purion Power Series family enables higher fab productivity, lower
cost of ownership and the ability to manufacture more advanced
silicon carbide power devices."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered
in Beverly, Mass., has been
providing innovative, high-productivity solutions for the
semiconductor industry for over 45 years. Axcelis is dedicated to
developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation
systems, one of the most critical and enabling steps in the IC
manufacturing process. Learn more about Axcelis at
www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.